Plasma Engineering LLC

Plasma Engineering LLCPlasma Engineering LLCPlasma Engineering LLC
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Plasma Engineering LLC

Plasma Engineering LLCPlasma Engineering LLCPlasma Engineering LLC
Home
About
Expertise
Consulting
Short Courses
Free Publications
Contact
More
  • Home
  • About
  • Expertise
  • Consulting
  • Short Courses
  • Free Publications
  • Contact
  • Home
  • About
  • Expertise
  • Consulting
  • Short Courses
  • Free Publications
  • Contact

Publications (Open Access): Plasma-focused

Current-Voltage characteristics

Relation of glow and arc discharges

A. Anders, Glows, arcs, ohmic discharges: An electrode-centered review on discharge modes and the transitions between them, Appl. Phys. Rev., 11 (2024) 031310.

Download from https://doi.org/10.1063/5.0205274

Tutorial on reactive HiPIMS

A. Anders, Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS), J. Appl. Phys., 121 (2017) 171101.

Download from https://doi.org/10.1063/1.4978350

One of the first reports on spokes in HiPIMS

A. Anders, P. Ni, A. Rauch, Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering, J. Appl. Phys., 111 (2012) 053304.

Download from https://doi.org/10.1063/1.3692978

Atmospheric pressure plasma gas conversion

M. Rudolph, P. Birtel, T. Arnold, A. Prager, S. Naumov, U. Helmstedt, A. Anders, P.C. With, Low-temperature atmospheric pressure plasma conversion of polydimethylsiloxane and polysilazane precursor layers to oxide thin films, Plasma Processes and Polymers, 20 (2023) e2200229. Download from https://doi.org/10.1002/ppap.202200229

Global modeling of argon excitation in HiPIMS

M. Rudolph, A. Revel, D. Lundin, N. Brenning, M.A. Raadu, A. Anders, T.M. Minea, J.T. Gudmundsson, On the population density of the argon excited levels in a high power impulse magnetron sputtering discharge, Phys. Plasmas, 29 (2022) 023506.

Download from https://doi.org/10.1063/5.0071887

Foundation paper on physical vapor deposition (PVD)

J.T. Gudmundsson, A. Anders, A. von Keudell, Foundations of physical vapor deposition with plasma assistance, Plasma Sources Science and Technology, 31 (2022) 083001.

Download from  https://doi.org/10.1088/1361-6595/ac7f53

Reducing secondary electron emission by pulsed laser ablation

E. Bez, M. Himmerlich, P. Lorenz, M. Ehrhardt, A.G. Gunn, S. Pfeiffer, M. Rimoldi, M. Taborelli, K. Zimmer, P. Chiggiato, A. Anders, Influence of wavelength and accumulated fluence at picosecond laser-induced surface roughening of copper on secondary electron yield, J. Appl. Phys., 133 (2023) 035303.

Download from https://doi.org/10.1063/5.0131916

Ion energies in reactive cathodic arc deposition

R. Franz, P. Polcik, A. Anders, Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres, Surf. Coat. Technol., 272 (2015) 309-321.

Download from https://doi.org/10.1016/j.surfcoat.2015.03.047

Influence of the magnetic field on HiPIMS discharges

M. Rudolph, N. Brenning, H. Hajihoseini, M.A. Raadu, T.M. Minea, A. Anders, J.T. Gudmundsson, D. Lundin, Influence of the magnetic field on the discharge physics of a high power impulse magnetron sputtering discharge, J. Phys. D: Appl. Phys., 55 (2022) 015202.

Download from https://doi.org/10.1088/1361-6463/ac2968

Plasma potential distribution in spokes of a DC magnetron

 M. Panjan, A. Anders, Plasma potential of a moving ionization zone in DC magnetron sputtering, J. Appl. Phys., 121 (2017) 063302.

Download from https://doi.org/10.1063/1.4974944 

Ar gas pressure effect on ion energy and charge state distributions in pulsed cathodic arc plasmas

 S. Zöhrer, A. Anders, R. Franz, Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb–Al cathodes studied with high time resolution, J. Phys. D: Appl. Phys., 52 (2019) 055201.

Download from  https://doi.org/10.1088/1361-6463/aaeecc 

More Publications (Open Access): Materials-focused

cross section TEM of (V,Al)N thin film

Effects of kinetic and potential ion energies on (V,Al)N thin films

Y. Unutulmazsoy, D. Kalanov, K. Oh, S. Karimi Aghda, J.W. Gerlach, N. Braun, F. Munnik, A. Lotnyk, J.M. Schneider, A. Anders, Toward decoupling the effects of kinetic and potential ion energies: Ion flux dependent structural properties of thin (V,Al)N films deposited by pulsed filtered cathodic arc, J. Vac. Sci. Technol. A, 41 (2023).

Download from https://doi.org/10.1116/6.0002927

Platinum electrodes in solid acid fuel cells

O. Lorenz, A. Kühne, M. Rudolph, W. Diyatmika, A. Prager, J.W. Gerlach, J. Griebel, S. Winkler, A. Lotnyk, A. Anders, B. Abel, Role of reaction intermediate diffusion on the performance of platinum electrodes in solid acid fuel cells, Catalysts, 11 (2021) 1065.

Download from https://doi.org/10.3390/catal11091065

Deposition of transparent all-oxide transistors

T. Rembert, C. Battaglia, A. Anders, A. Javey, Room temperature oxide deposition approach to fully transparent, all-oxide thin-film transistors, Advanced Materials, 27 (2015) 6090-6095.

Download from https://doi.org/10.1002/adma.201502159

Deposition of tunable Bragg filters

X. Wang, Z. Gong, K. Dong, S. Lou, J. Slack, A. Anders, J. Yao, Tunable Bragg filters with a phase transition material defect layer, Opt. Express, 24 (2016) 20365-20372.

Download from https://doi.org/10.1364/OE.24.020365

InGaN/GaN superlattices

J. Wang, V.R. Thota, E.A. Stinaff, M. Ebdah, A. Anders, W.M. Jadwisienczak, Structural and optical studies of InGaN/GaN superlattices implanted with Eu ions, MRS Advances, 2 (2017) 179-187.

Download from  https://doi.org/10.1557/adv.2017.153 

Cathodic arcs with composite versus intermetallic Nb–Al cathodes

S. Zöhrer, M. Golizadeh, N. Koutná, D. Holec, A. Anders, R. Franz, Erosion and cathodic arc plasma of Nb–Al cathodes: composite versus intermetallic, Plasma Sources Sci. Technol., 29 (2020) 025022.

Download from  https://doi.org/10.1088/1361-6595/ab5e32

Ion beam deposition of gallium oxide thin films

D. Kalanov, J.W. Gerlach, C. Bundesmann, J. Bauer, A. Lotnyk, H. von Wenckstern, A. Anders, Y. Unutulmazsoy, Heteroepitaxial growth of Ga2O3 thin films on Al2O3(0001) by ion beam sputter deposition, J. Appl. Phys., 136 (2024) 015302.

Download from https://doi.org/10.1063/5.0211179

Structure evolution and stability of (TiAl)N thin films

 S. Karimi Aghda, D.M. Holzapfel, D. Music, Y. Unutulmazsoy, S. Mráz, D. Bogdanovski, G. Fidanboy, M. Hans, D. Primetzhofer, A.S.J. Méndez, A. Anders, J.M. Schneider, Ion kinetic energy- and ion flux-dependent mechanical properties and thermal stability of (Ti,Al)N thin films, Acta Materialia, 250 (2023) 118864.

Download from https://doi.org/10.1016/j.actamat.2023.118864 

Structure evolution of VAlN thin films

 S. Karimi Aghda, D. Music, Y. Unutulmazsoy, H.H. Sua, S. Mráz, M. Hans, D. Primetzhofer, A. Anders, J.M. Schneider, Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin films, Acta Materialia, 214 (2021) 117003.

Download from https://doi.org/10.1016/j.actamat.2021.117003 

Effects of kinetic and potential ion energies on film crystallinity

 D. Kalanov, S. Mandazhiev, J. Franze, A. Anders, Y. Unutulmazsoy, Decoupling the effects of potential energy, kinetic energy, and ion flux on crystallinity of V-Al and V-Al-N thin films in pulsed filtered cathodic arc deposition, Surf. Coat. Technol., 497 (2025) 131720.

Download from https://doi.org/10.1016/j.surfcoat.2024.131720 

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